6

Steady state lattice heating by hot carriers in silicon bipolar transistors

Year:
1987
Language:
english
File:
PDF, 137 KB
english, 1987
11

Ex situ wafer surface cleaning by HF dipping for low temperature silicon epitaxy

Year:
1997
Language:
english
File:
PDF, 779 KB
english, 1997
12

Phosphorus doping of epitaxial Si and Si1−xGex at very low pressure

Year:
1993
Language:
english
File:
PDF, 665 KB
english, 1993
21

Thin Film Processes || Plasma-Enhanced Chemical Vapor Deposition

Year:
1991
Language:
english
File:
PDF, 1.99 MB
english, 1991
28

Silicon Layer Stacking Enabled by Wafer Bonding

Year:
2006
Language:
english
File:
PDF, 2.87 MB
english, 2006
42

Growth and Characterization of Silicon-Germanium Films on Oxide by VLPCVD/PE-VLPCVD

Year:
1993
Language:
english
File:
PDF, 1.26 MB
english, 1993
46

Raman scattering in polycrystalline silicon doped with boron

Year:
1992
Language:
english
File:
PDF, 1.13 MB
english, 1992
50

Effects of hydrogen and deposition pressure on Si1−xGex growth rate

Year:
1992
Language:
english
File:
PDF, 584 KB
english, 1992